Self-focusing SIMS with in-situ SPM: a paradigm shift in 3D-metrology KU Leuven
Imec has recently proposed an integrated solution to this paradox by solving the resolution and statistics problem using the so called Self-Focusing SIMS (SF-SIMS)1,2,3 concept and the 3D-heterogeneity problem by performing these measurements in a novel system based on the combination of a ToF-SIMS (Time of Flight - Secondary Ions Mass Spectrometry) and an in-situ AFM (Atomic Force Microscope) instrument. This does lead to a metrology concept ...