Providing different patterns on a single substrate. Interuniversity Microelectronics Centre
A method for providing different patterns on a single substrate, the method comprising executing at least twice a sequence of the following steps: depositing (120) a hardmask (230) on the layer of interest (220) and patterning the hardmask with a predefined pattern to create an accessible portion on the layer of interest (220); spinning (130) a glass/carbon layer (240) on the hardmask (230) and on the accessible portion of the layer of interest (220); spin coating (140) a block copolymer (250) on the glass/carbon layer (240); transferring (150) a predefined block copolymer pattern onto the ...