Atom-by-atom analysis of advanced semiconductor devices: unraveling the physics of atom probe tomography KU Leuven
This dissertation will begin with a general background introduction of atom probe tomography and the urgent needs and applications of atom probe tomography due to current metrology challenges induced by both the shrinkage and the architecture change (from planar to 3D structures) of next-generation semiconductor devices. The objective of this PhD study is to develop the experimental, theoretical and fundamental insight in Atomprobe Tomography ...