Enabling 3D scanning probe microscopy for nanoelectronics device analysis and TCAD calibration of advanced technology nodes KU Leuven
Important breakthroughs in nanoelectronics device manufacturing are directly linked to disruptive innovations in the materials characterization domain. Scanning probe microscopy (SPM) is one of these enabling techniques because it can measure a broad range of physical properties (e.g. topography, electrical, and magnetic signals) with unrivaled spatial resolution. Scientific research has been the critical enabler for establishing these ...