Study and Optimization of mechanical-electronical interaction in micromachined inertial sensors Ghent University
The goal of this project is to increase the accuracy of micromachined inertial sensor such as accelerometers and gyroscopes. For this purpose, the various imperfections of the mechanical structure and readout electronics will be modeled. Based on thse models, we will investigate whether the effect of these imperfections can be suppressed through the use of Sigma Delta control loops.