Development of Reliable High-k Gate Dielectrics at Reduced Thermal Budget, for Integration on III-V Channels with Limited Thermal Stability and Sequential 3D Processing KU Leuven
Over the last years and decennia, the use of digital technology has increased up to the point where nearly every household has multiple laptops, tablets, mobile phones, ... . This technology has revolutionized multiple sectors (medicine, economics, communication, ...) and even most major security and defense systems now operate on this digital platform. However, as its importance gains, so does the request for faster, cheaper and more secure ...