Projects
B budget True Atom (True atom probe tomography for semiconductor) 2020. University of Antwerp
B budget IMEC - True Atom (True atom probe tomography for semiconductor) 2019. University of Antwerp
Atomic scale observation of atom distributions in 3D devices using atom probe tomography KU Leuven
The rapid growth of the semiconductor industry over the past several decades was enabled by scaling of the integrated circuits to smaller physical dimensions, which allowed to increase their performance simultaneously decreasing their cost. However, due to this decrease of dimensions, the complexity of semiconductor devices had to be increased to preserve and improve their functionality. New device architectures and additional materials are ...
B budget IMEC - True atom probe tomography 2022. University of Antwerp
Atom-by-atom analysis of advanced semiconductor devices: unraveling the physics of atom probe tomography KU Leuven
This dissertation will begin with a general background introduction of atom probe tomography and the urgent needs and applications of atom probe tomography due to current metrology challenges induced by both the shrinkage and the architecture change (from planar to 3D structures) of next-generation semiconductor devices. The objective of this PhD study is to develop the experimental, theoretical and fundamental insight in Atomprobe Tomography ...
Towards improved atom probe tomography analysis of semiconductors : unraveling the dynamic evolution of the semiconductor emitter KU Leuven
To improve performance, the building blocks of electronics are continuously downsizing requiring control of their material properties and chemical composition at the nanoscale. This can be achieved using high resolution microscopes, such as the atom probe. Here, atoms are successively (ionized and) removed from the surface of the sample (shaped as a nanoscale needle) via a very high electric field and a laser pulse. Subsequently, the ionized ...
Laser-assisted atom probe tomography of oxide materials: Field evaporation mechanism study and performance improvement KU Leuven
Ternary/doped oxides that exhibit electronic/ionic conductivity are essential for a wide range of applications, e.g. as transparent conductors in photovoltaics and flexible electronics, or as an ion conducting solid electrolyte for Li ion batteries. The electronic/ionic conductivity of these oxides is determined by structural properties at the atomic scale. Therefore, atomic scale control during synthesis and atomic scale characterization of ...
Atom probe tomography for advanced materials studies in 3D. KU Leuven
A consortium composed of research units from KU Leuven, Universiteit Hasselt and UGent has the ambition to create an atomprobe tomography user facility at the disposal for Flemisch research purposes. This emerging technology offers mind-blowing insight in the atomic composition of advanced materials or complex 3-dimensional nanostructures. This technique allows to reconstruct a digital image of the atomic composition of materials with ...