Deposition of highly crystalline 2D materials Interuniversity Microelectronics Centre
A method for providing a film of one or more monolayers of transition metal dichalcogenides on a substrate. The method comprising providing (110) a substrate, and the method, furthermore, comprising a sequence of: depositing (120) at least one monolayer of the transition metal dichalcogenides on the substrate; selectively removing (130) superficial islands on top of the at least one monolayer by thermal etching.