Publications

We present a site-specific elemental analysis of nano-scale patterns whereby the data acquisition is based on Rutherford backscattering spectrometry (RBS). The analysis builds on probing a large ensemble of identical nanostructures. This ensures that a very good limit of detection can be achieved. In addition, the analysis exploits the energy loss effects of the backscattered ions within the nanostructures to distinguish signals coming from ...

Rutherford backscattering spectrometry (RBS) is an analytical method able to provide quantitatively elemental information with high accuracy in the near surface region of samples. However, the technique conventionally lacks the required (sub)micron spatial resolution for many semiconductor applications. Firstly, the ion beam current of a highly focused beam is very small, limiting the analytical sensitivity of the measurement. Secondly, the ...

We study the size-dependent optical properties of periodic arrays of semiconducting nanolines in the near-infrared to near-ultraviolet spectral range, where the absorption of the semiconductor increases. Using band structure calculations, we demonstrate that specific dimensions allow the slow down of the light, resulting in an enhanced absorption as compared to bulk material once the extinction coefficient of the semiconductor becomes comparable ...