Enhanced Electrical Activation in In-Implanted Si0.35Ge0.65 by C Co-Doping KU Leuven
© 2016 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group. In this report, we have achieved a significant increase in the electrically active dopant fraction in Indium (In)-implanted Si0.35Ge0.65, by co-doping with the isovalent element Carbon (C). Electrical measurements have been correlated with X-ray absorption spectroscopy to determine the electrical properties and the In atom lattice location. With C + ...