Multiscale numerical simulations of magnetron sputter deposition. University of Antwerp
Université d'Orléans, Plasma Lab for Applications in Sustainability and Medicine - Antwerp (PLASMANT)
Numerical simulations allow to gain insight in basic processes underlying the complexity of real-life experiments. In this project, multiscale simulations are carried out to investigate the formation of thin catalytic Pt layers in a magnetron sputter deposition setup. Fluid simulations are employed to study the macroscale sputter deposition process. This provides the input needed for the subsequent microscale / atomic scale simulations. In these ...