Researcher
Felix Mattelaer
- Disciplines:Electrochemistry, Nanophysics and nanosystems, Nanoelectronics, Surfaces, interfaces, 2D materials, Semiconductor devices, nanoelectronics and technology
Affiliations
- Department of Solid State Sciences (Department)
Member
From16 Aug 2012 → 31 Dec 2020
Publications
1 - 10 of 56
- Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate(2022)
Authors: Andreas Werbrouck, Felix Mattelaer, Arpan Dhara, Mikko Nisula, Matthias Minjauw, Frans Munnik, Jolien Dendooven, Christophe Detavernier
Pages: 3543 - 3551 - Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries(2021)
Authors: Lowie Henderick, Hamid Hamed, Felix Mattelaer, Matthias Minjauw, Mikko Nisula, Johan Meersschaut, Jolien Dendooven, Mohammadhosein Safari, Philippe Vereecken, Christophe Detavernier
- A secondary reaction pathway for the alumina atomic layer deposition process with trimethylaluminum and water, revealed by full-range, time-resolved in situ mass spectrometry(2020)
Authors: Andreas Werbrouck, Mahdi Shirazi, Felix Mattelaer, Simon D. Elliott, Jolien Dendooven, Christophe Detavernier
Pages: 26443 - 26454 - Thermal and plasma-enhanced atomic layer deposition of yttrium oxide films and the properties of water wettability(2020)
Authors: Bo Zhao, Felix Mattelaer, Geert Rampelberg, Jolien Dendooven, Christophe Detavernier
Pages: 3179 - 3187 - Atomic layer deposition of indium‐tin‐oxide as multifunctional coatings on V2O5 thin‐film model electrode for lithium‐ion batteries(2020)
Authors: Bo Zhao, Mikko Nisula, Arpan Dhara, Lowie Henderick, Felix Mattelaer, Jolien Dendooven, Christophe Detavernier
- Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma(2020)
Authors: Andreas Werbrouck, Felix Mattelaer, Matthias Minjauw, Mikko Nisula, Jaakko Julin, Frans Munnik, Jolien Dendooven, Christophe Detavernier
Pages: 27829 - 27839 - Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor(2020)
Authors: Felix Mattelaer, Michiel Van Daele, Matthias Minjauw, Mikko Nisula, Simon D. Elliott, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier
Pages: 4152 - 4165 - Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface properties(2020)
Authors: Sofie Vandenbroucke, Felix Mattelaer, Karolien Jans, Christophe Detavernier, Tim Stakenborg, Rita Vos
Number of pages: 1 - Atomic layer deposition of nitrogen-doped Al phosphate coatings for Li-ion battery applications(2020)
Authors: Lowie Henderick, Hamid Hamed, Felix Mattelaer, Matthias Minjauw, Johan Meersschaut, Jolien Dendooven, Mohammadhosein Safari, Philippe Vereecken, Christophe Detavernier
Pages: 25949 - 25960 - A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films(2020)
Authors: Li'ao Cao, Felix Mattelaer, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier