Researcher
Annelies Delabie
- Disciplines:Physical chemistry, Theoretical and computational chemistry, Other chemical sciences, Biochemistry and metabolism, Medical biochemistry and metabolism, Atmospheric sciences
Affiliations
- Quantum Chemistry and Physical Chemistry (Division)
Member
From1 Oct 2012 → Today
Projects
1 - 10 of 19
- Ferroelectric memories: multi-layers stacks with tailored physical and electric properties by atomic layer depositionFrom20 Oct 2023 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Atomic-scale bottom-up fabrication: Area-Selective Deposition (ASD) of Si-based dielectrics and its application in IC manufacturingFrom15 Oct 2023 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Interface study of ferroelectric/oxide semiconductor stacks and devicesFrom20 Sep 2023 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Area-selective deposition mechanisms when pattern dimensions reach the nanoscaleFrom11 Sep 2023 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Atomic layer deposition of two-dimensional transition metal dichalcogenides and ovonic threshold switching materials: A new computational framework for precursor designFrom1 Oct 2022 → TodayFunding: FWO Strategic Basic Research Grant
- Alternative semiconducting oxides for future DRAM applicationsFrom25 May 2022 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Creating dielectric layers on two-dimensional (2D) semiconductors: chemical and physical mechanismsFrom18 Jan 2022 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Mechanisms and Selectivity during Atomic Layer Deposition of Germanium Chalcogenides for Storage Class Memory ApplicationsFrom1 Oct 2021 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Dielectric Nanosheets for Scaled Two-Dimensional (2D) Material DevicesFrom22 Jan 2021 → TodayFunding: Own budget, for example: patrimony, inscription fees, gifts
- Towards graphoepitaxy of semiconducting 2D single crystals on dielectric substrate patterns for next generation nanoelectronic devicesFrom5 Jan 2021 → TodayFunding: FWO Strategic Basic Research Grant
Publications
31 - 40 of 180
- Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism(2018)
Authors: Benjamin Groven, Johan Meersschaut, Ben Schoenaers, Andre Stesmans, Valeri Afanasiev, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 7648 - 7663 - Formation mechanism of 2D SnS2 and SnS by chemical vapor deposition using SnCl4 and H2S(2018)
Authors: Haodong Zhang, Yashwanth Balaji, Ankit Nalin Mehta, Marc Heyns, Iuliana Radu, Wilfried Vandervorst, Annelies Delabie
Pages: 6172 - 6178 - Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon(2018)
Authors: Annelies Delabie
Pages: 3223 - 3232 - Nucleation and Growth Mechanism of 2D SnS2 by Chemical Vapor Deposition: Initial 3D Growth Followed by 2D Lateral Growth(2018)
Authors: Haodong Zhang, Ankit Nalin Mehta, Iuliana Radu, Wilfried Vandervorst, Annelies Delabie
- The Conversion Mechanism of Amorphous Silicon to Stoichiometric WS2(2018)
Authors: Markus Heyne, Iuliana Radu, Annelies Delabie, Stefan De Gendt
Pages: 4122 - 4130 - Nucleation Mechanism during WS2 Plasma Enhanced Atomic Layer Deposition on Amorphous Al2O3 and Sapphire Substrates(2017)
Authors: Benjamin Groven, Ankit Nalin Mehta, Johan Meersschaut, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 1 - 11 - MoS2 Functionalization with a Sub-nm Thin SiO2 Layer for Atomic Layer Deposition of High-k Dielectrics(2017)
Authors: Haodong Zhang, Goutham Arutchelvan, Johan Meersschaut, Abhinav Gaur, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 6772 - 6780 - Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H-2 Plasma, and H2S(2017)
Authors: Benjamin Groven, Markus Heyne, Johan Meersschaut, Wilfried Vandervorst, Stefan De Gendt, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 2927 - 2938 - Nucleation and growth mechanisms of Al2O3 atomic layer deposition on synthetic polycrystalline MoS2(2017)
Authors: Haodong Zhang, Manuel Mannarino, Iuliana Radu, Wilfried Vandervorst, Annelies Delabie
Pages: 052810 - 052810 - A deep-level transient spectroscopy study of p-type silicon Schottky barriers containing a Si-O superlattice(2017)
Authors: Suseendran Jayachandran, Annelies Delabie, Marc Heyns
Pages: 1 - 5
Patents
1 - 10 of 10
- Method of manufacturing a semiconductor structure (Inventor)
- Method of manufacturing a semiconductor structure (Inventor)
- A method for forming a vertical hetero-stack and a device including a vertical hetero-stack (Inventor)
- A method for forming a silicide gate for a semiconductor device (Inventor)
- Method of producing transition metal dichalcogenide layer (Inventor)
- Method for forming a vertical hetero-stack and a device including a vertical hetero-stack (Inventor)
- Method of forming a feature of a target material on a substrate (Inventor)
- METHOD OF PRODUCING TRANSITION METAL DICHALCOGENIDE LAYER (Inventor)
- Method for selectively depositing noble metals on metal/metal nitride substrates (Inventor)
- Oxygen monolayer on a semiconductor (Inventor)