< Back to previous pagePublication New perspectives on thermal and hyperthermal oxidation of Si surfaces Book - DissertationNumber of pages: 191Publication year:2013 Keywords:Doctoral thesisHandle: https://hdl.handle.net/10067/1061410151162165141 Accessibility:ClosedAuthors/publisherUmedjon Khalilov (Author)Universiteit Antwerpen, Faculteit Wetenschappen, Departement Scheikunde (Publisher)Research unitsPlasma Lab for Applications in Sustainability and Medicine - Antwerp (PLASMANT)(Research group)University of Antwerp
