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Project
Modeling of the plasma chemistry in CHxFy based gas mixtures for microelectronics applications.
This project represents a formal research agreement between UA and on the other hand Erasmus Mundus. UA provides Erasmus Mundus research results mentioned in the title of the project under the conditions as stipulated in this contract.
Date:5 Oct 2013 → 7 Apr 2014
Keywords:PLASMA CATALYSIS, MATERIALS CHEMISTRY, MICRO ELECTRONICS
Disciplines:Applied mathematics in specific fields, Classical physics, Physics of gases, plasmas and electric discharges