A method for manufacturing a waveguide for guiding an electro-magnetic wave

A method for manufacturing of a waveguide (100) for guiding an electro-magnetic wave comprising: forming a first waveguide layer (502), a sacrificial layer (504) and a protection layer (506) on a first wafer (500), patterning to define a pattern of a first waveguide part (102) and a supporting structure (112) in the first waveguide layer (502); exposing the sacrificial layer (504) on the first waveguide part (102) while the protection layer (506) still covers the sacrificial layer (504) on the supporting structure (112); removing the sacrificial layer (504) on the first waveguide part (102); removing the protection layer (506); bonding a second wafer (510) to the sacrificial layer (504) of the first wafer (500) such that a second waveguide part (104) is supported by the supporting structure (112) and a gap (106) corresponding to the thickness of the sacrificial layer (504) is formed between the first and second waveguide parts.

Patent Publication Number: EP3663818

Year filing: 2022

Year approval: 2022

Year publication: 2022

Status: Assigned

Technology domains: Optics, Measurement

Validated for IOF-key: Yes

Attributed to: Associatie KULeuven