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Publication

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Journal Contribution - Journal Article

Journal: Micro and Nano Engineering

Volume: 12

Publication year:2021

Institutional Repository URL: https://lirias.kuleuven.be/3541874
DOI: https://doi.org/10.1016/j.mne.2021.100089
WoS Id: 000686134600002

Accessibility:Open