Publication

Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles

Journal: Journal of Micro-Nanolithography, MEMS, and MOEMS

ISSN: 1932-5150

Issue: 2

Volume: 20

Publication year:2021

BOF-keylabel:yes

IOF-keylabel:yes

BOF-publication weight:1

CSS-citation score:1

Authors:International

Authors from:Government, Higher Education

Accessibility:Closed