< Back to previous page

Publication

Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems

Journal Contribution - Journal Article

Journal: ACS Applied Polymer Materials
ISSN: 2637-6105
Issue: 4
Volume: 3
Pages: 1964 - 1972
Publication year:2021
BOF-keylabel:yes
IOF-keylabel:yes
CSS-citation score:1
Authors:International
Authors from:Government, Higher Education
Accessibility:Open