Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries

PE-ALD of nitrogen doped Ti-phosphate has been investigated in two dierent deposition processes. Both processes were analysed by in-situ ellipsometry (to monitor the growth of the lm) and X-ray photoelectron spectroscopy/elastic recoil detection (to study the composition). First, previous knowledge on rapid PE-ALD of undoped Ti-phosphate using an exposure sequence of trimethyl phosphate plasma-oxygen plasma-titanium isopropoxide, i.e. TMP*-O* 2-TTIP, was used to 1

Publication year:2021

Keywords:Atomic layer deposition, Plasma-enhanced deposition, Nitrogen doping, Titanium phosphate, Lithium-ion battery, Functional coating

BOF-keylabel:yes

IOF-keylabel:yes

BOF-publication weight:6

Authors from:Government, Higher Education, Private

Accessibility:Open