Properties of ALD aluminum-doped ZnO as transparent conductive oxide

Thin films of aluminum-doped ZnO are prepared by Atomic Layer Deposition (ALD). The properties of these films toward application as transparent conductive oxides are studied. It is obtained that doped films possess high optical transmittance (>85%) in the visible and near-infrared spectral ranges. A resistivity as low as 3x10(-3) Omega.cm depending of the Al content in the doped film is measured. The observed high conductivity and high transparency fulfil the requirements for transparent conductors.

Publication year:2016

Keywords:A1 Journal article

BOF-keylabel:yes

BOF-publication weight:0.1

CSS-citation score:1

Authors:International

Authors from:Higher Education

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