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Project

Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

Piezoelectric micromachined ultrasound transducers (pMUTs) are nowadays replacing bulk PZT based transducers in various applications like medical imaging, finger print sensors, rangefinding. pMUTs have an edge over the conventional technology due to their small dimension, low power consumption, high element density, and easy and cheap fabrication process. In applications like brain stimulation, intravascular imaging, wearable ultrasound devices, the array capabilities can be enhanced if they conform with complex geometries. However, up to date, making pMUT arrays flexible (and conformable) remains a challenge. This PhD aims at the study and development of approaches for making pMUTs flexible. For example, one can start with rigid substrate or flexible substrate or even develop a hybrid approach to realize flexible pMUT arrray. Here, the design should take care of electrical accessibility and integration of individual array element which is one of the major issues faced by 2D pMUT arrays.

Date:17 Dec 2020 →  Today
Keywords:MEMS, Piezoelectric Materials, Ultrasound Transducers
Disciplines:Micro- and nanoelectromechanical systems
Project type:PhD project