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Publication
Critical dimension metrology using Raman spectroscopy
Journal Contribution - Journal Article
Journal: Applied Physics Letters
ISSN: 0003-6951
Issue: 4
Volume: 117
Publication year:2020
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:1
CSS-citation score:1
Authors:International
Authors from:Government, Higher Education
Accessibility:Closed