Predicting yield of photonic circuits with wafer-scale fabrication variability : invited paper

We present a workflow for variability analysis and yield prediction of photonic integrated circuits affected by fabrication variations. The technique combines synthetic wafer maps with layout-aware Monte-Carlo simulations. We demonstrate this on different layout configurations of linewidth-tolerant Mach-Zehnder interferometers.

ISBN:9781538695166

Publication year:2019