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Publication

Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

Book Contribution - Book Chapter Conference Contribution

Book: Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII

Volume: 11292

Number of pages: 1

ISBN:9781510633483

Publication year:2020

Handle: http://hdl.handle.net/1854/LU-8653351
WoS Id: 000576673000001
ArticleNumber: 1129204

Accessibility:Open