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Publication

Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns

Journal Contribution - Journal Article

Journal: Advanced Materials interfaces
ISSN: 2196-7350
Issue: 20
Volume: 6
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:2
CSS-citation score:1
Authors from:Government, Higher Education
Accessibility:Open