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Publication
Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition
Journal Contribution - Journal Article
Journal: Journal of Materials Chemistry C
ISSN: 2050-7526
Issue: 38
Volume: 7
Pages: 11911 - 11918
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:3
CSS-citation score:2
Authors from:Government, Higher Education
Accessibility:Open