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Project
GEMINI - Generic Electronics and Microsystems Integration
This project will develop a generic technology for the integration of microsystems and electronics, based on deposited SiGe layers with controlled stress. Te photonics research group will use these layers to design and characterize a optical modulator.
Date:1 Mar 2007 → 28 Feb 2011
Keywords:diffraction gratings, microsystems, MEMS
Disciplines:Nanotechnology, Classical physics, Applied mathematics in specific fields, Optical physics, Design theories and methods