< Back to previous page
Publication
Actuators: Accomplishments, opportunities and challenges
Journal Contribution - Journal Article
This article gives a condensed review of the MEMS actuators that have seen light in the past three decades. Since the electrostatic drive comes almost natural when creating mechanical devices with the available MEMS technology, greater importance is highlighted. Nevertheless, by introducing more non-IC related materials, other devices are presented, and range from magnetic and piezo-electric drive, to applications based on hydraulics and pneumatic actuation.
Journal: Sensors and Actuators A, Physical
ISSN: 0924-4247
Volume: 295
Pages: 604 - 611
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:1
CSS-citation score:1
Authors:International
Authors from:Higher Education
Accessibility:Open