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Publication
Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact Preface
Book Contribution - Chapter
Book: METAL IMPURITIES IN SILICON- AND GERMANIUM-BASED TECHNOLOGIES: ORIGIN, CHARACTERIZATION, CONTROL, AND DEVICE IMPACT
Pages: VII - VIII
Number of pages: 2
ISBN:978-3-319-93924-7
Publication year:2018