< Back to previous page
Publication
Nucleation enhancement and area-selective atomic layer deposition of ruthenium using RuO4 and H2 gas
Journal Contribution - Journal Article
Subtitle:Nucleation Enhancement and Area-Selective Atomic Layer Deposition of Ruthenium Using RuO4 and H-2 Gas
Journal: CHEMISTRY OF MATERIALS
ISSN: 1520-5002
Issue: 5
Volume: 31
Pages: 1491 - 1499
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:10
CSS-citation score:2
Authors:National
Authors from:Higher Education
Accessibility:Open