< Back to previous page
Publication
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures (vol 28, pg C1H5, 2010)
Journal Contribution - Journal Article
Journal: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures
ISSN: 1071-1023
Issue: 3
Volume: 28
Pages: 648 - 648
Publication year:2010