Multiscale numerical simulations of magnetron sputter deposition.

Numerical simulations allow to gain insight in basic processes underlying the complexity of real-life experiments. In this project, multiscale simulations are carried out to investigate the formation of thin catalytic Pt layers in a magnetron sputter deposition setup. Fluid simulations are employed to study the macroscale sputter deposition process. This provides the input needed for the subsequent microscale / atomic scale simulations. In these atomic scale simulations, novel methodologies – in particular collective variable-driven hyperdynamics – are used to access time scales well beyond the reach of standard molecular dynamics techniques. From these simulations, we hope to reach a better understanding of how the morphology and structure of thin Pt films is formed and could be steered.

Keywords:PLASMA CHEMISTRY, CATALYSIS, SIMULATIONS

Disciplines:Applied mathematics in specific fields, Classical physics, Physics of gases, plasmas and electric discharges, Physical chemistry

Project type:Collaboration project