Alternative metals and nanowires for advanced interconnect applications

In the PhD thesis, the electrical, structural, and mechanical properties of thin films and nanowires of alternative metals will be studied. A particular focus will be on the understanding of the scattering mechanisms (surface, grain boundaries) that dominate at small dimensions. Both Pt group metals as well as novel ternary carbides will be studied. I will develop suitable deposition processes for the alternative metals, fabricate nanowires and characterize the thin films and nanowires. The desired outcome is the fundamental understanding of the materials properties at reduced dimensions (1D/2D) and small sizes, enabling the benchmarking and the downselection of materials for scaled interconnect systems in future microelectronic circuits. In conclusion the thesis will combine the deposition of thin films and the nanofabrication of nanowires with electrical, structural, and mechanical materials characterization. The development and assessment of advanced characterization methods and the physics-based modeling of the resistivity will play important roles.