Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates

© 2015 IEEE. The influence of Ni thickness on the formation of Nickel suicides was systematically investigated between 0 and 15nm. Annealing thickness gradients distinguishes Alms that agglomerate (>5nm) and films that are morphologically stable (<5nm). Alloying the initial Ni layer influences this critical thickness to higher (Al, Co) and lower (Ge, Pd, Pt) values. Pole figures and in situ XRD provides information to understand this observed shift in critical thickness.

ISBN:978-1-4673-7356-2

Publication year:2015

BOF-keylabel:yes

IOF-keylabel:yes

Authors from:Higher Education