Combined SEM-STEM for high-resolution and high-throughput imaging and analysis of advanced materials. (CombiS(T)EM)

It is often said that "a picture is worth a thousand words". In materials science the capability of imaging the sample is a revelation, uncovering novel structures or phenomena. Transmission electron microscopy (TEM) with its ability to combine high-resolution nanoscale imaging, diffraction and chemical analysis has been one of the most important characterization techniques in materials science. The CombiS(T)EM is the ultimate solution for highly efficient nanoscale characterization to strengthen the leading position in materials synthesis, development, and processing in order to meet the future materials challenges with respect to the industrial needs and requirements. The proposed CombiS(T)EM provides high-resolution and high-throughput imaging and elemental analysis combined with in-situ experiments. It also circumvents the general drawback of a TEM – producing a projected "shadow" image of the sample – using an additional SE detector so that the TEM gains the capability of a SEM to image the surface morphology.