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Researcher
Arantxa Maestre Caro
- Disciplines:Biochemistry and metabolism, Medical biochemistry and metabolism, Physical chemistry, Theoretical and computational chemistry, Other chemical sciences, Atmospheric sciences
Affiliations
- Quantum Chemistry and Physical Chemistry (Division)
Member
From17 Sep 2007 → 16 Sep 2011
Publications
1 - 8 of 8
- Selective self-assembled monolayer coating to enable Cu-to-Cu connectionin dual damascene vias(2013)
Authors: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Pages: 76 - 80 - Electrical properties of amino SAM layers studied with conductive AFM(2013)
Authors: Ravi Chandra Chintala, Arantxa Maestre Caro, Yiting Sun, Wilfried Vandervorst
Pages: 1952 - 1956 - Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules(2011)
Authors: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Number of pages: 3 - Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS(2011)
Authors: Silvia Lenci, Francesco Pieri, Luc Haspeslagh, Jeroen De Coster, Stefaan Decoutere, Arantxa Maestre Caro, Silvia Armini, Ann Witvrouw
Pages: 2136 - 2139 - Materials engineering for future interconnects: catalyst-free electroless Cu deposition on self-assembled monolayer alternative barriers(2010)
Authors: Arantxa Maestre Caro
Pages: D74 - D80 - Electroless Cu deposition on self-assembled monolayer alternative barriers(2009)
Authors: Arantxa Maestre Caro
Pages: 1156 - Screening self-assembled monolayers as Cu diffusion barriers(2008)
Authors: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Pages: 2047 - 2050 - High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
Authors: Arantxa Maestre Caro, Larry Zhao, Guido Maes, Gustaaf Borghs, Gerald Beyer, Zsolt Tokei, Silvia Armini, Youssef Travaly
Pages: 183 - 188