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Researcher
Li'ao Cao
- Disciplines:Condensed matter physics and nanophysics
Affiliations
- Department of Solid State Sciences (Department)
Member
From26 Aug 2016 → Today
Publications
1 - 3 of 3
- A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films(2020)
Authors: Li'ao Cao, Felix Mattelaer, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier
- Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study(2019)
Authors: Ba Tai Truong, Li'ao Cao, Felix Mattelaer, Geert Rampelberg, Fatemeh SM Hashemi, Jolien Dendooven, J Ruud van Ommen, Christophe Detavernier
Pages: 485 - 494 - Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films(2019)
Authors: Fatemeh SM Hashemi, Li'ao Cao, Felix Mattelaer, Timo Sajavaara, J Ruud van Ommen, Christophe Detavernier