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Researcher
Jan Doise
- Disciplines:Modelling, Multimedia processing, Sensors, biosensors and smart sensors, Other electrical and electronic engineering, Other engineering and technology
Affiliations
- Department of Electrical Engineering (ESAT) (Department)
Member
From1 Oct 2013 → 21 Jan 2018
Projects
1 - 1 of 1
- Implementation of block copolymer based directed self-assembly for advanced lithography.From3 Sep 2013 → 31 Dec 2018Funding: BOF - Doctoral projects, IWT personal funding - strategic basic research grants
Publications
1 - 10 of 24
- Influence of Homopolymer Addition in Templated Assembly of Cylindrical Block Copolymers(2019)
Authors: Jan Doise
Pages: 4073 - 4082 - Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions(2018)
Authors: Chun Zhou, Tsuyoshi Kurosawab, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Roel Gronheid, Pauline Rincon-Delgadillo, Akiyoshi Yamazaki, et al.
- Dual brush process for selective surface modification in graphoepitaxy directed self-assembly(2017)
Authors: Jan Doise
Pages: 33503 - Dual brush process for selective surface modification in graphoepitaxy directed self-assembly(2017)
Authors: Jan Doise
Pages: 101460 - Via patterning in the 7-nm node using immersion lithography and graphoepitaxy directed self-assembly(2017)
Authors: Jan Doise
Pages: 023506 - 023506 - High-chi, Si-Containing Block Copolymers and Process Strategies for Directing Their Self-Assembly(2017)
Authors: Christopher J Ellison, C Grant Willson, Dustin Janes, Gregory Blachut, Yasunobu Soymeya, Paulina A Rincon Delgadillo, Geert Vandenberghe, Arjun Singh, Jan Doise, Natsuko Ito, et al.
Pages: 187 - 190 - Influence of template fill in grapho-epitaxy DSA(2016)
Authors: Jan Doise
Pages: 1 - 9 - EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes(2016)
Authors: Carolien Boeckx, Jan Doise, Ioannis Karageorgos
Pages: 97761 - Photo-responsive oligo(dimethylsiloxane) liquid crystals for defect-free nano-patterning at the sub-5 nm scale(2016)
Authors: Jan Doise
Pages: 10068 - 10072 - Influence of template fill in graphoepitaxy directed self-assembly(2016)
Authors: Jan Doise, Joost Bekaert, BT Chan, Sung Eun Hong, Guanyang Lin, Roel Gronheid
Pages: 31603
Patents
1 - 6 of 6
- Method for forming a cross-linked layer (Inventor)
- Directed self-assembly of block copolymers (Inventor)
- Method for manufacturing a mask (Inventor)
- Method for forming a cross-linked layer (Inventor)
- Method for manufacturing a mask (Inventor)
- Method for patterning a substrate involving directed self-assembly (Inventor)