Researcher
Benjamin Groven
- Disciplines:Physical chemistry, Theoretical and computational chemistry, Other chemical sciences, Biochemistry and metabolism, Medical biochemistry and metabolism, Atmospheric sciences
Affiliations
- Quantum Chemistry and Physical Chemistry (Division)
Member
From1 Oct 2014 → 31 Dec 2018
Projects
1 - 1 of 1
- Atomic layer deposition of single and few layered transition metaldichalcogenides for future logic applications.From21 Jan 2015 → 31 Dec 2018Funding: IWT personal funding - strategic basic research grants
Publications
1 - 10 of 15
- Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature(2019)
Authors: Benjamin Groven, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Annelies Delabie
- Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism(2018)
Authors: Benjamin Groven, Johan Meersschaut, Ben Schoenaers, Andre Stesmans, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 7648 - 7663 - Nucleation Mechanism during WS2 Plasma Enhanced Atomic Layer Deposition on Amorphous Al2O3 and Sapphire Substrates(2017)
Authors: Benjamin Groven, Ankit Nalin Mehta, Johan Meersschaut, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 1 - 11 - Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H-2 Plasma, and H2S(2017)
Authors: Benjamin Groven, Markus Heyne, Johan Meersschaut, Wilfried Vandervorst, Stefan De Gendt, Marc Heyns, Iuliana Radu, Annelies Delabie
Pages: 2927 - 2938 - Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties(2017)
Authors: Benjamin Groven, Quan Phung, Shibesh Dutta, Johan Meersschaut, Annelies Delabie
Pages: 4654 - 4666 - Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper(2016)
Authors: Benjamin Groven, Shibesh Dutta
Pages: 26119 - 26125 - Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents(2015)
Authors: Annelies Delabie, Benjamin Groven, Markus Heyne, Karel Haesevoets, Johan Meersschaut, Stefan De Gendt, Marc Heyns, Iuliana Radu
Pages: 15692 - 15695 - Understanding the EOT-J(g) degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition(2015)
Authors: Benjamin Groven, Johan Meersschaut, Annelies Delabie
Pages: 108 - 112 - Reaction of Methylcyclopentadienyl Manganese Tricarbonyl on Silicon Oxide Surfaces: Implications for Thin Film Atomic Layer Depositions(2014)
Authors: Benjamin Groven
Pages: 5308 - 5315 - Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H-2 Plasma, and H2S
Authors: Benjamin Groven, Markus Heyne, Ankit Nalin Mehta, Hugo Bender, Thomas Nuytten, Johan Meersschaut, Thierry Conard, Patrick Verdonck, Sven Van Elshocht, Wilfried Vandervorst, et al.
Pages: 2927 - 2938